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ADDITIVE LITHOGRAPHY FABRICATION AND INTEGRATION OF MICRO OPTICS
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TitleADDITIVE LITHOGRAPHY FABRICATION AND INTEGRATION OF MICRO OPTICS
AuthorPitchumani, Mahesh
Keywordsadditive lithography
lithography
micro optics
diffractive optical elements
DOE
etching
RIE
ICP
fused silica
selectivity
lens
toroidal
vortex
AbstractOptical elements are the fundamental components in photonic systems and are used to transform an input optical beam into a desired beam profile or to couple the input beam into waveguides, fibers, or other optical systems or devices. Macroscopic optical elements are easily fabricated using grinding and polishing techniques, but few methods exist for inexpensive fabrication of micro optical elements. In this work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt photoresist into the desired optical surface relief profile. We explore various masking schemes for fabricating a variety of optical elements with unprecedented flexibility and precision. These masking schemes used in conjunction with the additive lithographic method allows us to carefully control the photoresist exposure and reflow processes for fabricating complex aspheric lens elements, including aspheric elements whose fabrication often proves highly problematic. It will be demonstrated that employing additive lithography for volume sculpting followed by controlled reflow can also allow us to fabricate refractive beam shaping elements. Finally we will discuss the dry etching techniques used to transfer these optical elements into the glass substrate. Thus the additive lithography technique will be demonstrated as an inexpensive, high throughput and efficient process in the fabrication of micro optical elements.
AdviserJohnson, Eric
PublisherUniversity of Central Florida
DegreePh.D.
Degree GrantorOptics and Photonics
Degree ProgramOptics
Graduation Date2006-05-01
TypeDoctoral dissertation
Access LevelPublic - Allow Worldwide Access
Release Date2006-05-10
RepositoryUniversity Archives
Repository CollectionElectronic Theses and Dissertations
IdentifierCFE0000914
Access Linkhttp://purl.fcla.edu/fcla/etd/CFE0000914

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